Benjamen M. Rathsack, Peter I. Tattersall, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Benjamen M. Rathsack, Peter I. Tattersall, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Dario L. Goldfarb, Libor Vyklicky, et al.
J. Photopolym. Sci. Tech.
Katherina Babich, Arpan P. Mahorowala, et al.
Microlithography 2003
David B. Mitzi, David R. Medeiros, et al.
Chemistry of Materials