Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using a gas transpiration method, the equilibrium constant for the reaction ZnO(s) + H2(v)⇄ Zn(v) + H2O(v) was determined directly in the temperature interval 592-950°C. The data are described by the equation log10K = [-11.794 × 103/T] + 8.040 with ΔH° = 53.97 Kcal/mole and ΔS° = 36.79 e.u. Based on this Information, vapor-solid gas concentration curves useful for defining conditions for the chemical vapor transport of ZnO via the reverse of the above reaction have been computer calculated. © 1972 The Metallurgical of Society of AIME.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
J. Tersoff
Applied Surface Science
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999