P.E. Batson
Microscopy and Microanalysis
Paper
The IBM computer-stem system
Abstract
The system of computer control of STEM operation for EELS acquisition is described. The ability to obtain analytical information from 1 nm sized areas during a 15 min integration time is illustrated. The system of hardware and software is discussed in general terms to highlight the organizational philosophy which allows complex and adaptable behavior with a minimum of construction effort. © 1982.
Related
Conference paper
Studies of EELS L2,3 absorption fine structure in thin silicon
P.E. Batson
Microscopy of Semiconducting Materials 1991
Conference paper
Symmetry-selected electron energy loss scattering
P.E. Batson
MSA Annual Meeting 1993
P.E. Batson, J.F. Morar
Applied Physics Letters