H.S. Sachdev, R.W. Kwong, et al.
Microelectronic Engineering
Conference paper
The use of the low voltage SEM in IC fabrication
Related
Michael G. Rosenfield, A. Starikov
Microelectronic Engineering
Conference paper
Performance analysis of tapered gate in PD/SOI CMOS technology
W. Hwang, C.T. Chuang, et al.
VLSI-TSA 2001
W. Hwang, C.T. Chuang, et al.
International Journal of Electronics