Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Four experimental spectra measured in a low-energy positron diffraction (LEPD) experiment on Cu{111} are satisfactorily matched by intensity calculations. The calculations were carried out with a computer program developed for LEED (low-energy electron diffraction) but using a potential consisting of negative Coulomb contribution, no exchange term and the correlation correction used normally for electrons. The present experimental data are not refined enough to show that positrons do not feel an exchange potential. © 1980.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
T.N. Morgan
Semiconductor Science and Technology
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering