W.D. Hinsberg, F.A. Houle, et al.
Journal of Physical Chemistry A
A report is presented on the thermal decomposition behavior of several polymethacrylates and the effect of the ester structure on the thermolysis in correlation with the photosensitivity in acid-catalyzed thermolysis. Differential scanning calorimetry (DSC) curves of the polymethacrylates and presented together with that of PMAA Polymethacrylic Acid PMAA loses absorbed water below 140°C (1st heating), and then dehydrates to form PMAN, at the temperature ranging from 180 to 260°C.
W.D. Hinsberg, F.A. Houle, et al.
Journal of Physical Chemistry A
P. Rao Varanasi, Ann Marie Mewherter, et al.
J. Photopolym. Sci. Tech.
Hiroshi Ito
IBM J. Res. Dev
A.T.S. Pomerene, K.E. Petrillo, et al.
Microlithography 1994