Conference paper
The future of silicide for CMOS contacts
R.A. Roy, C. Cabral Jr., et al.
MRS Spring Meeting 1999
Films of the high-temperature superconductor in the Bi-Sr-Ca-Cu-O system were deposited by pulsed laser evaporation from a ceramic disk. Films deposited onto (100) MgO show x-ray diffraction patterns characteristic of c-axis textured Bi2(Sr,Ca,Bi)3Cu2Ox phase following annealing for 10 min at 850 °C in 20% O2-80% N2. These textured films have zero resistance at 78 K and show resistance drops near 110 K. The effects of the annealing environment on the electrical and structural properties are presented.
R.A. Roy, C. Cabral Jr., et al.
MRS Spring Meeting 1999
M. Hamaguchi, H. Yin, et al.
VLSI Technology 2008
K.L. Saenger, K.E. Fogel, et al.
Applied Physics Letters
A. Grill, V.V. Patel, et al.
MRS Fall Meeting 1996