Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this paper we present our vision of an information infrastructure for grid computing, which is based on a service oriented architecture. The infrastructure supports a virtualized view of the computing and data resources, is automatic (driven by policies) in order to meet application goals for quality of service, and is compatible with the standards being developed in the technical community. We describe how we are implementing this vision in IBM today and how we expect the implementation to evolve in the future. © 2004 IBM.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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SPIE Optical Science, Engineering, and Instrumentation 1998
Frank R. Libsch, S.C. Lien
IBM J. Res. Dev
Michael D. Moffitt
ICCAD 2009