Batch fabrication of SMA-actuated polymer microvalves
M. Kohl, T. Grund, et al.
SMST 2007
We report a simple atomic force microscopy-based concept for a hard disk-like data storage technology. Thermomechanical writing by heating a Si cantilever in contact with a spinning polycarbonate disk has already been reported. Here the medium has been replaced with a thin polymer layer on a Si substrate, resulting in significant improvements in storage density. With this new medium, we achieve bit sizes of 10-50 nm, leading to data densities of 500 Gbit/in.2. We also demonstrate a novel high-speed and high-resolution thermal readback method, which uses the same Si cantilevers that are used in the writing process, and the capability to erase and rewrite data features repeatedly. © 1999 American Institute of Physics.
M. Kohl, T. Grund, et al.
SMST 2007
T. Brunschwiler, S. Paredes, et al.
3DIC 2009
G. Binnig, N. Garcia, et al.
Physical Review B
H.P. Lang, M.K. Baller, et al.
MEMS 1999