P. Vettiger, J. Brugger, et al.
Microelectronic Engineering
A scheme is described that resolves the problem of coupling sensitive equipment to a heat exchanger while retaining excellent isolation against vibrations in an ultrahigh vacuum environment.
P. Vettiger, J. Brugger, et al.
Microelectronic Engineering
H. Pozidis, P. Bächtold, et al.
INEC 2006
A. Stalder, U. Dürig
Applied Physics Letters
U.Ch. Fischer, U. Dürig, et al.
Applied Physics Letters