Vladimir Yanovski, Israel A. Wagner, et al.
Ann. Math. Artif. Intell.
Vladimir Yanovski, Israel A. Wagner, et al.
Ann. Math. Artif. Intell.
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003