P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Producing nanopores in block copolymer films by crosslinking the matrix was shown to be very simple, highly reproducible, and predictable. Via this route, the original ordering of the copolymer was maintained, providing a template in which nanoscopic holes can be produced. Thus, the results present a unique method by which the size limit of the pores in block copolymer thin films can be extended well beyond that achievable using neat block copolymer itself.
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A. Gangulee, F.M. D'Heurle
Thin Solid Films
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
H.D. Dulman, R.H. Pantell, et al.
Physical Review B