Paper
X‐ray lithography
R. Feder, E. Spiller, et al.
Polymer Engineering & Science
X-ray micrographs of biological objects have been obtained with a resolution better than 1000 angstroms by using poly(methyl methacrylate) x-ray resist and carbon Ka or synchrotron radiation. Synchrotron radiation allows short exposure times; storage rings especially designed as radiation sources and improved x-ray resists would make exposure times under 1 second possible.
R. Feder, E. Spiller, et al.
Polymer Engineering & Science
E. Spiller, R.A. McCorkle, et al.
Optical and Optoelectronic Applied Science and Engineering 1990
E. Spiller, J.S. Wilczynski, et al.
SPIE San Diego 1991
R.J. Bartlett, D.R. Kania, et al.
Proceedings of SPIE 1989