Oliver C. Wells, Conrad G. Bremer
Review of Scientific Instruments
Paper
XY table and tilting stage for scanning electron microscope (SEM)
Abstract
This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.
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Oliver C. Wells
Review of Scientific Instruments
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Review of Scientific Instruments
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Scanning