Summary Abstract: Reactive ion-etching-related Si surface residues and subsurface disorder
- G.S. Oehrlein
- J.G. Clabes
- et al.
- 1986
- JVSTA
Publications
23 results for J.G. Clabes
Summary Abstract: The origin of oxidation induced enhancement of Si+ sputter yield in SIMS
- D.J. Vitkavage
- J.G. Clabes
- et al.
- 1985
- JVSTA
Chemical reaction and Schottky-barrier formation at V/Si interfaces
- J.G. Clabes
- G.W. Rubloff
- et al.
- 1984
- Physical Review B