Review of inductively coupled plasmas for plasma processing
- J. Hopwood
- 1999
- Plasma Sources Science and Technology
Publications
6 results for J. Hopwood
Planar RF induction plasma coupling efficiency
- J. Hopwood
- 1994
- Plasma Sources Science and Technology
Magnetron sputter deposition with high levels of metal ionization
- S.M. Rossnagel
- J. Hopwood
- 1993
- Applied Physics Letters
Ion bombardment energy distributions in a radio frequency induction plasma
- J. Hopwood
- 1993
- Applied Physics Letters
Electromagnetic fields in a radio-frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Langmuir probe measurements of a radio frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films