Large-field particle beam optics for projection and proximity printing and for maskless lithography
- Hans Loeschner
- Gerhard Stengl
- et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
Publications
8 results for Andreas Dietzel
Ion projection direct-structuring for nanotechnology applications
- Hans Loeschner
- Ernest J. Fantner
- et al.
- 2002
- MRS Proceedings 2002
Ion projection printing for patterning of magnetic media
- Andreas Dietzel
- Ruediger Berger
- et al.
- 2002
- INTERMAG 2002
In situ slider-to-disk spacing on a nanometer scale controlled by microheater-induced slider deformations
- A. Dietzel
- R. Berger
- et al.
- 2002
- Sensors and Actuators, A: Physical
Ion projection printing for patterning of magnetic media
- A. Dietzel
- R. Berger
- et al.
- 2002
- INTERMAG 2002
Ion projection direct structuring for patterning of magnetic media
- Andreas Dietzel
- Rüdiger Berger
- et al.
- 2002
- IEEE Transactions on Magnetics
Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives
- P. Mächtle
- R. Berger
- et al.
- 2001
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Nanoscale magnetostrictive response in a thin film owing to a local magnetic field
- R. Berger
- F. Krause
- et al.
- 2000
- Applied Physics Letters