Publications

2 results for I.A. Shareef

Role of gas phase reactions in subatmospheric chemical-vapor deposition ozone/TEOS processes for oxide deposition
- - I.A. Shareef
  - G.W. Rubloff
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Subatmospheric chemical vapor deposition ozone/TEOS process for SiO₂ trench filling
- - I.A. Shareef
  - G.W. Rubloff
  - et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures