Progress in large area selective silicon deposition for TFT/LCD applications
- Jun H. Souk
- Gregory N. Parsons
- 1994
- MRS Spring Meeting 1994
Publications
15 results at MRS Spring Meeting 1994
Photobleaching of PL and temperature dependence of ESR in nitrogen-rich amorphous silicon nitride films
- D. Chen
- J.M. Viner
- et al.
- 1994
- MRS Spring Meeting 1994
High performance metallization issues for ULSI
- R. Rosenberg
- 1994
- MRS Spring Meeting 1994
Interface reaction kinetics for permalloy-tantalum thin film couples
- A.J. Kellock
- J.E.E. Baglin
- et al.
- 1994
- MRS Spring Meeting 1994
Comparative Cu diffusion studies in advanced metallizations of Cu and Al-Cu based thin films
- D. Gupta
- 1994
- MRS Spring Meeting 1994