Reactive Ion Etching of Silicon Nitride Deposited by Different Methods in CF4/H2 Plasmas
- W.A. Lanford
- 2019
- JES
Publications
509 results at JES
The Effect of Cyanide on the Oxidation of Formaldehyde on Au, Cu, and Pd Electrodes
- Jean Horkans
- 2019
- JES
Sidewall Spacer Technology for MOS and Bipolar Devices
- Sang H. Dhong
- Edward J. Petrillo
- 2019
- JES
Reactive Ion Etching in SF6 Gas Mixtures
- R. Pinto
- R.S. Babu
- 2019
- JES
Photoinitiated Cross-Linking and Image Formation in Thin Polymer Films Containing a Transition Metal Compound
- C. Grant Willson
- 2019
- JES
Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
- E. Tierney
- 2019
- JES
Electroplated Magnetic Media with Vertical Anisotropy
- Jean Horkans
- I-Chia Hsu Chang
- et al.
- 2019
- JES
In Situ Scanning Tunneling Microscopy of Copper Deposition with Benzotriazole
- Rolf H. Muller
- 2019
- JES
Selective Wet and Dry Etching of Hydrogenated Amorphous Silicon and Related Materials
- I. Haller
- Y.H. Lee
- et al.
- 2019
- JES
Dopant Diffusion in Self-Aligned Silicide/Silicon Structures
- Marc Wittmer
- 2019
- JES