Summary Abstract: Diagnostics in plasma processing
- J.W. Coburn
- 1986
- JVSTA
Publications
176 results at JVSTA
Contact and metallization problems in GaAs integrated circuits
- N. Braslau
- 1986
- JVSTA
Properties of reactively sputtered tungsten films in nitrogen and oxygen
- K.Y. Ahn
- S.B. Brodskv
- et al.
- 1986
- JVSTA
Nanosecond pulsed laser-induced segregation of Te in TeOx films
- W.-Y. Lee
- H. Coufal
- et al.
- 1986
- JVSTA
Synchrotron-radiation excited carbon is photoemission study of Cr/organic polymer interfaces
- J.L. Jordan
- P.N. Sanda
- et al.
- 1986
- JVSTA
Reactive radio frequency sputter deposition of higher nitrides of titanium, zirconium, and hafnium
- D.S. Yee
- J.J. Cuomo
- et al.
- 1986
- JVSTA
Summary Abstract: Electron vibrational spectroscopy of polymer-vacuum and polvmer-metal interfaces
- J.E. Demuth
- T.C. Clark
- 1986
- JVSTA
Interaction of metals with model polymer surfaces: Core level photoemission studies
- P.N. Sanda
- J.W. Bartha
- et al.
- 1986
- JVSTA
Langmuir probe characterization of magnetron operation
- H.R. Kaufman
- S.M. Rossnagel
- 1986
- JVSTA
Summary Abstract: High temperature decomposition of SiO2at the Si/SiO2 interface
- G.W. Rubloff
- R.M. Tromp
- et al.
- 1986
- JVSTA