Low Temperature Atmospheric Pressure Chemical Vapor Deposition for Epitaxial Growth of SiGe Bipolar TransistorsD.A. GrutzmacherD.A. Grutzmacher1995JES
PECVD Silicon Nitride as a Gate Dielectric for Amorphous Silicon Thin Film Transistor Process and Device PerformanceYue Kuo1995JES
Electrochemical Fabrication of Mechanically Robust PbSn C4 InterconnectionsJ. RoederH. Deligianniet al.1995JES
Laser-Assisted Seeding for Electroless Plating on Polyimide SurfacesA.G. SchrottBodil Brarenet al.1995JES
High Selectivity Magnetically Enhanced Reactive Ion Etching of Boron Nitride FilmsBernhard NeureitherSon Nguyenet al.1994JES