Mary A. Breton  Mary A. Breton photo         

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Metrology Manager
Albany, NY


Professional Associations

Professional Associations:  Society of Women Engineers

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More information:  LinkedIn  |  Google Scholar  |  ResearchGate


Mary is the manager of the inline metrology group within IBM Hybrid Cloud Technology Research at the Albany location, where the site focuses on semiconductor R&D. The group explores a variety of electron, optical, magnetic, scanning, and x-ray based techniques for dimensional and material measurements. In her role as a metrology engineer, she was heavily involved in inline CDSEM, AFM, and scatterometry projects.

On the side, Mary is involved with MIT & RPI recruiting for IBM, new hire programming, and pubbing cool things that Research works on through the Semiconductor site !

Mary's Bachelor of Science degree (S.B.) is from Massachusetts Institute of Technology (MIT) from the Department of Materials Science and Engineering (DMSE). She received her Masters of Engineering (M.Eng) from Rensselaer Polytechnic Institute's (RPI's) Materials Science and Engineering (MSE) Department in 2017 and researched under Dr. Robert Hull. She was a summer metrology intern at IBM's East Fishkill site developing an algorithm to reduce model build time for scatterometry projects before joining IBM full-time.