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Lithography Materials     

links

 photo Hiroyuki (Hiro) Miyazoe photoLeslie E. Thompson photo

  • Overview
  • EUV Materials
  • E-Beam Materials
  • Directed Self-Assembly of Block Copolymers

Lithography Materials - E-Beam Materials


There should probably be a link here to the E-Beam lithography web page at: http://researcher.watson.ibm.com/researcher/view_project_subpage.php?id=3604

This is a place holder for the new E-Beam Materials web page




Background

The Lithographic Process

Chemically Amplified Resists (CAR)

Polymer Dissolution

  • QCM/Reflectance Analysis of Dissolution Kinetics
  • Kinetic model for resist dissolution
  • Teas Solubility Parameter Map

Image Blur in CAR

  • Origins of Image Blur
  • Kinetic Modeling
  • Chemistry & SEMs


Current Projects

EUV Materials
E-Beam Materials
Directed Self-Assembly
Exploratory

  • DNA Origami
  • Nanoprobe