Alfred Grill  Alfred Grill photo       

contact information

IBM Fellow
Thomas J. Watson Research Center, Yorktown Heights, NY USA


Professional Associations

Professional Associations:  Materials Research Society (MRS)  |  National Academy of Engineering


PECVD low and ultralow dielectric constant materials: From invention and research to products
A. Grill
Journal of Vacuum Science & Technology B 34, 020801 (2016); doi: 10.1116/1.4943049


Induced e-beam charge impact on spatial orientation of gate-all-around silicon wires device fabricated on Boron Nitride substrate
Shimon Levi ; Konstantin Chirko ; Ofer Adan ; Guy Cohen ; Sarunya Bangsaruntip ; Leathen Shi ; Alfred Grill ; Deborah Neumayer
Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography, 2015


Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects State of the art
Alfred Grill, Stephen M. Gates, Todd E. Ryan, Son V. Nguyen, and Deepika Priyadarshini3

Effect of Low-frequency RF on PECVD Deposited Ultra low-k Dielectric Films for VLSI Interconnects
E. Todd Ryan, Stephen M. Gates, Stephan A. Cohen, Yuri Ostrovski, Ed Adams, K. Virwani, and Alfred Grill
J.Appl.Phys. 115(144107), 2014

Ultrathin (8-14 nm) conformal SiN for sub-20 nm Copper/Low k interconnects,
Son V. Nguyen, D. Priyadarshini, H. Shobha, T. Haigh Jr., C.-K. Hu, S. Cohen, E. Liniger, T. Shaw, E. Adams, J. Burnham, A. Madan, N. Klymko, C. Parks, D. Yang, Jr., S. Molis, G. Bonilla, A. Grill, D. Edelstein, D. Canaperi, L.-Q. Xia, S. Reit
ECS Transactions, 61 61(3)(17-28), 2014

Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects State of the art
Alfred Grill, Stephen M. Gates, Todd E. Ryan, Son V. Nguyen, and Deepika Priyadarshini
Appl. Phys. Reviews 1(011306), 2014


Effect of SiC wafer miscut angle on the morphology and Hall mobility of epitaxially grown graphene
C. Dimitrakopoulos, A. Grill, T.J. McArdle, Z. Liu, R. Wisnieff, D.A. Antoniadis
Applied Physics Letters 98(22), 222105--222105, AIP, 2011

Multi-Layer Epitaxial Graphene Formed from Poly-Crystalline Silicon Carbide Grown on C-Plane Sapphire
T. McArdle, J. Chu, Y. Zhu, Z. Liu, M. Krishnan, C. Breslin, C. Dimitrakopoulos, R. Wisnieff, A. Grill
Bulletin of the American Physical Society, 56 (2), APS March Meeting, 2011

Wafer-scale graphene integrated circuit
Yu-Ming Lin, Alberto Valdes-Garcia, Shu-Jen Han, Damon B Farmer, Inanc Meric, Yanning Sun, Yanqing Wu, Christos Dimitrakopoulos, Alfred Grill, Phaedon Avouris, others
Science 332(6035), 1294--1297, American Association for the Advancement of Science, 2011


Graphene RF Transistor Performance
K.A. Jenkins, Y. Lin, D. Farmer, C. Dimitrakopoulos, H.Y. Chiu, A. Valdes-Garcia, P. Avouris, A. Grill
ECS Transactions 28(5), 3--13, The Electrochemical Society, 2010

Graphene-based fast electronics and optoelectronics
P Avouris, Y Lin, F Xia, T Mueller, DB Farmer, C Dimitrakopoulos, A Grill
Device Research Conference (DRC), 2010, pp. 205--206

Wafer-scale epitaxial graphene growth on the Si-face of hexagonal SiC (0001) for high frequency transistors
Christos Dimitrakopoulos, Yu-Ming Lin, Alfred Grill, Damon B Farmer, Marcus Freitag, Yanning Sun, Shu-Jen Han, Zhihong Chen, Keith A Jenkins, Yu Zhu, others
Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures 28(5), 985--992, AVS, 2010

Multicarrier transport in epitaxial multilayer graphene
Yu-Ming Lin, Christos Dimitrakopoulos, Damon B Farmer, Shu-Jen Han, Yanqing Wu, Wenjuan Zhu, D Kurt Gaskill, Joseph L Tedesco, Rachael L Myers-Ward, Charles R Eddy, others
Applied Physics Letters 97(11), 112107--112107, AIP, 2010

100-GHz transistors from wafer-scale epitaxial graphene
Y.M. Lin, C. Dimitrakopoulos, K.A. Jenkins, D.B. Farmer, H.Y. Chiu, A. Grill, P. Avouris
Science 327(5966), 662--662, American Association for the Advancement of Science, 2010

Silane Decomposition on Cu Interconnects Inhibited by Ammonia
E T Ryan, S Molis, A Grill
Journal of The Electrochemical Society157, H78, 2010


Porous pSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared by PECVD
A Grill
Annual Review of Materials Research39, 49--69, Annual Reviews, 2009

X-ray Scattering Methods for Porosity Metrology of Low-k Thin Films
CM Settens, VK Kamineni, GA Antonelli, A Grill, AC Diebold, RJ Matyi
American Institute of Physics Conference Series, pp. 163--167, 2009

Spectroscopic Ellipsometry of Porous Low-kappa Dielectric Thin Films
VK Kamineni, CM Settens, A Grill, GA Antonelli, RJ Matyi, AC Diebold
American Institute of Physics Conference Series, pp. 168--172, 2009

Adjusting the skeleton and pore structure of porous SiCOH dielectrics
SM Gates, G. Dubois, ET Ryan, A. Grill, M. Liu, D. Gidley
Journal of the Electrochemical Society156, G156, 2009


Interface engineering for high interfacial strength between SiCOH and porous SiCOH interconnect dielectrics and diffusion caps
A Grill, D Edelstein, M Lane, V Patel, S Gates, D Restaino, S Molis
Journal of Applied Physics103, 054104, 2008


Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition
SM Gates, DA Neumayer, MH Sherwood, A Grill, X Wang, M Sankarapandian
Journal of applied physics 101(9), 094103--094103, AIP, 2007

A Porous SiCOH Dielectric with k= 2. 4 for High Performance BEOL Interconnects
SM Gates, A Grill, C Dimitrakopoulos, D Restaino, M Lane, V Patel, S Cohen, E Simonyi, E Linger, Y Ostrovski, others
Advanced Metallization Conference 2006(AMC 2006), 2007

Line resistance and electromigration variations induced by hydrogen-based plasma modifications to the silicon carbonitride/copper interface
E T Ryan, J Martin, G Bonilla, S Molis, T Spooner, J Widodo, J H Kim, E Liniger, A Grill, C K Hu
Journal of the Electrochemical Society154, H604, 2007

Enhanced Cracking Resistance of Plasma Deposited Low k SiCOH Films with Nano Imbedded Layers Insertion
S V Nguyen, E Liniger, K Ida, B Herbst, K Malone, N Klymko, S Cohen, E Simonyi, S Lane, C Dziobkowski, others
2007 -


65nm Cu integration and interconnect reliability in low stress k= 2.75 SiCOH
Restaino, A Sakamoto, TM Shaw, Y Shimooka, H …
Interconnect ..., 2006 -

A 45 nm CMOS node Cu/Low-k/Ultra Low-k PECVD SiCOH (k= 2.4) BEOL technology
S Sankaran, S Arai, R Augur, M Beck, G Biery, T Bolom, G Bonilla, O Bravo, K Chanda, M Chae, others
Electron Devices Meeting, 2006. IEDM'06. International, pp. 1--4

High performance 45-nm SOI technology with enhanced strain, porous low-k BEOL, and immersion lithography
S Narasimha, K Onishi, HM Nayfeh, A Waite, M Weybright, J Johnson, C Fonseca, D Corliss, C Robinson, M Crouse, others
Electron Devices Meeting, 2006, pp. 1--4

The effect of plasma chemistry on the damage induced to porous SiCOH dielectrics
A Grill, V Patel
Journal of the Electrochemical Society153, F169, 2006

Comparison of the fracture behavior of brittle ILD films used in the BEOL in dry and wet environment using nanoindentation
E E Simonyi, M Lane, E Liniger, A Grill
Materials, Technology and Reliability of Low-k Dielectrics and Copper Interconnects Proceedings of Symposium F held at the 2006 MRS Spring Meeting, pp. 389--394


Hydrogen plasma effects on ultralow-k porous SiCOH dielectrics
A Grill, V Sternhagen, D Neumayer, V Patel
Journal of applied physics 98(7), 074502--074502, AIP, 2005

Germanium-on-insulator photodetectors
SJ Koester, G Dehlinger, JD Schaub, JO Chu, QC Ouyang, A Grill
Group IV Photonics, 2005, pp. 171--173

High-speed germanium-on-insulator photodetectors
G Dehlinger, JD Schaub, SJ Koester, QC Ouyang, JO Chu, A Grill
Lasers and Electro-Optics Society, 2005, pp. 321--322


Optimization of SiCOH dielectrics for integration in a 90nm CMOS technology
A. Grill, D. Edelstein, D. Restaino, M. Lane, S. Gates, E. Liniger, T. Shaw, XH Liu, D. Klaus, V. Patel, others
Interconnect Technology Conference, 2004. Proceedings of the IEEE 2004 International, pp. 54--56

High-efficiency, Ge-on-SOI lateral PIN photodiodes with 29 GHz bandwidth
SJ Koester, JD Schaub, G Dehlinger, JO Chu, QC Ouyang, A Grill
Device Research Conference, 2004, pp. 175--176

Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
D Edelstein, H Rathore, C Davis, L Clevenger, A Cowley, T Nogami, B Agarwala, S Arai, A Carbone, K Chanda, others
Reliability Physics Symposium Proceedings, 2004, pp. 316--319

Reliability, yield, and performance of a 90 nm SOI/Cu/SiCOH technology
D Edelstein, C Davis, L Clevenger, M Yoon, A Cowley, T Nogami, H Rathore, B Agarwala, S Arai, A Carbone, others
Interconnect Technology Conference, 2004, pp. 214--216

Frequency response of top-gated carbon nanotube field-effect transistors
D V Singh, K A Jenkins, J Appenzeller, D Neumayer, A Grill, H S P Wong
IEEE Transactions on Nanotechnology 3(3), 383--387, Institute of Electrical and Electronics Engineers, Inc, 445 Hoes Ln, Piscataway, NJ, 08854-1331, USA,, 2004


Diamond-like carbon coatings as biocompatible materials—an overview
A Grill
Diamond and related materials 12(2), 166--170, Elsevier, 2003

Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study
A Grill, V Patel, KP Rodbell, E Huang, MR Baklanov, KP Mogilnikov, M Toney, H C Kim
Journal of Applied Physics94, 3427, 2003

Characterization of low-k to extreme low-k SiCOH dielectrics
A Grill, D A Neumayer
Dielectrics in emerging technologies: proceedings of the international symposium, pp. 315, 2003

Static frequency divider circuit using 0.15/spl mu/m gate length Si/sub 0.2/Ge/sub 0.8//Si/sub 0.7/Ge/sub 0.3/p-MODFETs
DV Singh, SJ Koester, JO Chu, KA Jenkins, PM Mooney, QC Ouyang, N Ruiz, JA Ott, D Ralston, M Wetzel, others
Electronics Letters 39(6), 570--572, 2003

High-quality crystalline layer transfer from a silicon-on-insulator substrate onto a sapphire substrate using wafer bonding
D V Singh, L Shi, K W Guarini, P M Mooney, S J Koester, A Grill
Journal of Electronic Materials 32(11), 1339--1343, Springer, 2003


A comprehensive simulation study of strained-Si/SiGe nMODFET scaling for RF applications
Q C Ouyang, S J Koester, J O Chu, A Grill, S Subbanna, DA Hennan
Simulation of Semiconductor Processes and Devices, 2002, pp. 59--62

Effects of precursor additives on the stability of plasma enhanced chemical vapor deposited a-GeC (O): H films
A Grill, S Guilley, V Patel, K Babich
Journal of Materials Research 17(2), 367--375, 2002


Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition
A Grill, V Patel
Applied Physics Letters 79(6), 803--805, AIP, 2001

Strained Si NMOSFETs for high performance CMOS technology
K Rim, S Koester, M Hargrove, J Chu, PM Mooney, J Ott, T Kanarsky, P Ronsheim, M Ieong, A Grill, others
VLSI Technology, 2001, pp. 59--60


Bottom Electrode Effects in Controlling Orientation of Lead Zirconate Titanate Films Deposited by Chemical Solution Deposition
D A Neumayer, K L Saenger, R B Laibowitz, T M Shaw, R Mih, A Grill

Oxygen stoichiometry in PdOx and PdOx/Pt electrode layers during processing of ferroelectric and high-epsilon perovskites
KL Saenger, C Cabral, PR Duncombe, A Grill, D Neumayer
Journal of Materials Research 15(4), 961--966, 2000


Electrical and optical properties of diamond-like carbon
A Grill
Thin Solid Films355, 189--193, Elsevier, 1999

Plasma-deposited diamondlike carbon and related materials
A Grill
IBM journal of research and development 43(1.2), 147--162, IBM, 1999

Plasma-deposited diamondlike carbon and related materials-Author bio
A Grill
IBM Journal of Research and Development 43(1/2), 1999

A Grill
Ferroelectric thin films VII: symposium held November 30-December 3, 1998, Boston, Massachusetts, USA, pp. 89, 1999

Fabrication of multilayer ferroelectric films
D A Neumayer, P R Duncombe, R B Laibowitz, T Shaw, L Berndt, CT Black, A Grill
Integrated Ferroelectrics 25(1), 275--286, Taylor \& Francis, 1999

Diamond-like carbon: state of the art
A Grill
Diamond and Related Materials 8(2), 428--434, Elsevier, 1999

Plasma-deposited diamondlike carbon and related materials-References
A Grill
IBM Journal of Research and Development 43(1/2), 1999



Diamondlike Carbon Materials as Low-k Dielectrics for Multilevel Interconnects in ULSI
A Grill, V Patel, KL Saenger, C Jahnes, SA Cohen, AG Schrott, DC Edelstein, JR Paraszczak

Friction control of diamond-like carbon coatings
C Donnet, A Grill
Surface and Coatings Technology94, 456--462, Elsevier, 1997

Tribology of diamondlike carbon and related materials: an updated review
A Grill
Surface and coatings technology94, 507--513, Elsevier, 1997

Dielectric and Structural Properties of Barium Strontium Titanate (BST) and Bismuth Titanante (BiTi) Sol-Gel Thin Films
RB Laibowitz, TN Shaw, PR Duncombe, D Neumeyer, A Grill, D Kotecki, KL Saenger, JD Baniecki, QY Ma
APS Meeting Abstracts, pp. 2608, 1997

Advanced Metallization and Interconnect Systems for ULSI Applications in 1996: Proceedings of the Conference Held October 1-3, 1996, in Boston, Massachusetts, Sponsored by Continuing Education in Engineering, University Extension, University of California, pp. 417, 1997

Chemical solution deposition of BaSrTiO 3 films
D A Neumayer, P R Duncombe, R B Laibowitz, A Grill
Integrated Ferroelectrics 18(1), 297--309, Taylor \& Francis, 1997

Preparation of (PB, LA) TIO 3 films by metal organic chemical vapor deposition with new lanthanum precursors
DA Neumayer, RJ Purtell, WF Kane, A Grill
Integrated Ferroelectrics 14(1), 85--93, Taylor \& Francis, 1997

Diamond-like, Carbon Coatings for Vacuum and Space Tribology
C Donnet, T Le Mogne, M Belin, J Sicre, G Pont, A Grill, V Patel, C Jahnes
7th European Space Mechanisms and Tribology Symposium, Proceedings of the conference held 1-3 October, 1997 at ESTEC, Noordwijk, the Netherlands


IBM-Research Division,“Diamondlike Carbon Materials as Low-k Dielectrics For Multilevel Interconnects in ULSI.” 10 pgs
A Grill, V Patel, KL Saenger, C Jahnes, SA Cohen, AG Schrott, DC Edelstein, JR Paraszczak
1996 - Fall, Fall

Properties and Applications of Thin Films of Lead Lanthanum Titanate (PLT) and Barium Strontium Titanate (BST)
RB Laibowitz, TM Shaw, DE Kotecki, S Tiwari, A Gupta, A Grill, PR Duncombe, DB Beach, S Bilodeau
APS Meeting Abstracts, pp. 2805, 1996


Thickness dependent dielectric properties of Sol-gel prepared lead lanthanum titanate films
DB Beach, RB Laibowitz, TM Shaw, A Grill, WF Kane
Integrated Ferroelectrics 7(1), 161--171, Taylor \& Francis, 1995

Platinum alloys and iridium bottom electrodes for perovskite based capacitors in dram applications
A Grill, MJ Brady
Integrated Ferroelectrics 8(3), 299--308, Taylor \& Francis, 1995

Preparation of strontium titanate films by MOCVD
A Grill, W Kane, D Beach, R Laibowitz, T Shaw
Integrated Ferroelectrics 7(1), 75--83, Taylor \& Francis, 1995


Tribochemistry of diamond-like carbon coatings in various environments
C Donnet, M Belin, JC Auge, JM Martin, A Grill, V Patel
Surface and Coatings Technology68, 626--631, Elsevier, 1994

Effects of bias and inert gas on properties of diamond-like carbon deposited by dc PACVD
A Grill, V Patel
Diamond and related materials 4(1), 62--68, Elsevier, 1994

Electrical resistivities of diamond-like carbon
A Grill, V Patel, S Cohen
Diamond and Related Materials 3(3), 281--284, Elsevier, 1994

Development and status of diamondlike carbon
A Grill, B S Meyerson
Synthetic diamond: emerging CVD science and technology, 91--141, 1994


Stresses in diamond-like carbon films
A Grill, V Patel
Diamond and Related Materials 2(12), 1519--1524, Elsevier, 1993

Film substrate bonding in IRF PACVD hard coatings on tool steels
R Avni, A Grill, A Rochman, R Perlman, U Carmi
11 th International Symposium on Plasma Chemistry, pp. 1034--1040, 1993

A Grill, V Patel
Proceedings of the Third International Symposium on Diamond Materials, pp. 442, 1993


Characterization of diamondlike carbon by infrared spectroscopy?
A Grill, V Patel
Applied physics letters 60(17), 2089--2091, AIP, 1992

Bottom Electrodes for High Dielectric Oxide Compounds: Effects on Crystallization of Lead Containing Ferroelectrics
A Grill, D Beach, C Smart, W Kane
Ferroelectric thin films III: symposium held April 13-16, 1993, San Francisco, California, USA, pp. 189, 1992


Diamond-like carbon as an electrical insulator of copper devices for chip cooling
E Marotta, N Bakhru, A Grill, V Patel, B Meyerson
Thin solid films 206(1-2), 188--191, Elsevier, 1991

A Grill
Proceedings of the Second International Symposium on Diamond Materials, pp. 374, 1991


Layer structure and mechanical properties of low pressure rf plasma nitrided Ti-6Al-4V alloy
A Grill, A Raveh, R Avni
Surface and Coatings Technology43, 745--755, Elsevier, 1990

Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene
A Grill, BS Meyerson, VV Patel
IBM journal of research and development 34(6), 849--857, IBM, 1990

The Effect of Deposition Conditions on the Optical and Tribological Properties of Annealed Diamond-Like Carbon Films
A Grill, V Patel, BS Meyerson
Diamond and Diamond-like Films and Coatings:[proceedings of a NATO Advanced Study Institute, held July 22-August 3, 1990 in Castelvecchio, Pascoli, Italy], 417, Plenum Pub Corp

A mathematical model for metal flow and heat transfer in centrifuge melt spinning
Z Rivlin, J Baram, A Grill
Metallurgical and Materials Transactions B 21(6), 1063--1073, Springer, 1990


Inhomogeneous carbon bonding in hydrogenated amorphous carbon films
A Grill, BS Meyerson, VV Patel, JA Reimer, MA Petrich
Journal of applied physics 61(8), 2874--2877, AIP, 1987

Decomposition of SiCl 4 and deposition of Si in inductively coupled plasmas of H 2+ SiCl 4
R Manory, R Avni, A Grill
Plasma Chemistry and Plasma Processing 7(2), 169--179, Springer, 1987


Boriding of steel in a cold RF plasma of diborane in argon
A Grill, I Finberg, R Avni, T Spalvins, DH Buckley
Materials Science and Engineering 78(2), 201--207, Elsevier, 1986


Surface hardening of steel by boriding in a cold rf plasma
I Finberg, R Avni, A Grill, T Spalvins, DH Buckley
Materials Letters 3(5-6), 187--190, Elsevier, 1985


Chlorine incorporation in silicon films deposited by low-pressure rf discharges in gas mixtures of SiCl 4+ H 2+ Ar
R Manory, A Grill, R Avni
Plasma Chemistry and Plasma Processing 4(4), 261--270, Springer, 1984


Effect of frequency on the deposition of microcrystalline silicon from tetrachlorosilane in low-pressure rf plasmas
E Grossman, A Grill, R Avni
Plasma Chemistry and Plasma Processing 2(4), 341--351, Springer, 1982

The thermal history of a composite cylinder girth welded by TIG
A Grill
International Journal for Numerical Methods in Engineering 18(7), John Wiley \& Sons, Ltd New York, 1982

Some properties of rf-sputtered hafnium nitride coatings
P R Aron, A Grill
Thin Solid Films 96(1), 87--91, Elsevier, 1982


Effect of current pulses on the temperature distribution and microstructure in TIG tantalum welds
A Grill
Metallurgical and Materials Transactions B 12(1), 187--192, Springer, 1981

Effect of arc oscillations on the temperature distribution and microstructure in GTA tantalum welds
A Grill
Metallurgical and Materials Transactions B 12(4), 667--674, Springer, 1981


Electrical conductivity of hot-pressed magnesia
A Sharon, D Itzhak, L Kornblit, A Grill
Materials Science and Engineering 45(2), 189--193, Elsevier, 1980

Computation of temperatures in thin tantalum sheet welding
Y Sharir, A Grill, J Pelleg
Metallurgical and Materials Transactions B 11(2), 257--265, Springer, 1980


The thermal loads in the finite element analysis of elasto-plastic stresses
A Grill, K Sorimachi
International Journal for Numerical Methods in Engineering 14(4), 499--505, 1979


Heat flow, gap formation and break-outs in the continuous casting of steel slabs
A Grill, K Sorimachi, J K Brimacombe
Metallurgical and Materials Transactions B 7(2), 177--189, Springer, 1976


Effect of diamagnetic substitutions in BaFe 12 O 19 on the magnetic properties
A Grill, F Haberey
Applied Physics A: Materials Science \& Processing 3(2), 131--134, Springer, 1974


Cerium--mischmetall (CeMM) and CeMM--cobalt analysis by x-ray fluorescence
D Feldmann, A Grill, W Mark
1973 -, Bochum Univ., Ger.


Paramagnetic Susceptibility of a 2p Unpaired Electron in a Crystalline Field
A Grill, M Schieber, J Shamir
Physical Review Letters 25(11), 747--749, APS, 1970

Magnetic Susceptibilities of Cubic Mixed Europium Oxides
A Grill, M Schieber
Physical Review B 1(5), 2241--2242, APS, 1970

Year Unknown

Electrical characterization of wafer-scale epitaxial graphene and its RF applications

... Digest (MTT), 2011 ..., 2011 -


JW Adkisson, CT Black, A Grill, RW Mann..., 0


... systems for ULSI applications in 1996: ..., 1997 - Materials Research Society, 0

A BEOL multilevel structure with ultra low-k materials (k≤ 2.4)

Interconnect ..., 2010 -

Spin Transport in Epitaxial Graphene on SiC (0001)

Bulletin of the American ..., 2012 - APS

Low and Ultralow Dielectric Constant Films Prepared by Plasma‐enhanced Chemical Vapor Deposition

Dielectric films for advanced microelectronics, 2007 - Wiley Online Library

Chemical solution deposition of BaSrTiO3 films

Integrated ..., 1997 - Taylor & Francis, 0

The effect of deposition conditions on the optical and tribological properties of annealed diamondlike carbon films,'

1991 - Plenum Press, New York, USA, 0

Property control of diamondlike carbon coatings by selection of precursor bias and dilutant

Protective Coatings and Thin Films, 1997 -, 0

Multiphase Low-K Materials Prepared by PECVD

Low and high dielectric constant materials: ..., 2000 -

Diamondlike Carbon Materials As Beol Interconnect Dielectrics: Integration Issues

Dielectric material ..., 1998 -, 0

IBM Rep. RC 13117

1987 - IBM Research Division, Yorktown, ..., 0

Tribological properties of diamond-like carbon and related materials

Diamond and Related Materials, 1993 - Elsevier, 0

Low-Dielectric Constant SiCOH Films as Potential Candidates for Interconnect Dielectrics

MATERIALS ..., 1999 - Warrendale, Pa.; Materials Research ..., 0

Wear-resistant fluorinated diamondlike carbon films

Surface and Coatings ..., 1997 - Elsevier, 0

Interaction of hydrogen plasma with extreme low-k SiCOH dielectrics

Journal of the Electrochemical Society, 2004 -

Diamond-like carbon prepared by high density plasma

Diamond and Related ..., 2000 - Elsevier

EELS analysis of hydrogenated diamond-like carbon films

Thin Solid Films, 1998 - Elsevier, 0

Base electrodes for high dielectric constant oxide materials in silicon technology

Journal of materials ..., 1992 - Cambridge Univ Press, 0

Tribochemistry between hydrogen and diamond-like carbon films

Surface and Coatings ..., 2001 - Elsevier

Optical and tribological properties of heat-treated diamond-like carbon

Journal of Materials ..., 1990 - Cambridge Univ Press

The Evaluation of Wrinkles in Textile Fabrics
M Shiloh, A Grill
Textile Research Journal, 0


5.6 Friction in diamond-like aC

Properties of amorphous carbon, 2003 -

Flux growth and magnetic characterization of calcium-silicon substituted ytterbium ...

Journal of Crystal Growth, 1972 -, 0

Two independent magnetic sublattices of Er in the Er5-x LaxGe3 system

Journal of Physics and Chemistry of Solids, 1974 -, 0

ISPC-6 Montreal, July 1983 Paper number C-8-4
R Avni, U Carmi, R Manory, E Grossman, A Grill, 0

chemical vapor deposition from acetylene
A Grill, BS Meyerson, VV Patel
A Grill, BS Meyerson..., 0

A Grill
A Grill, 0

Projects and Groups