Hiroyuki (Hiro) Miyazoe  Hiroyuki (Hiro) Miyazoe photo         

contact information

Research Staff Member - Plasma processings
Thomas J. Watson Research Center, Yorktown Heights, NY USA
  +1dash914dash945dash1084

links

Professional Associations

Professional Associations:  American Vacuum Society  |  The Japan Society of Applied Physics

more information

More information:  Linkedin Profile  |  Terashma Group - the University of Tokyo  |  Laboratory for Mechanics of Materials and Nanostructures - EMPA


2019



2018

Patterned sidewall smoothing using a pre-smoothed inverted tone pattern
Lai Kafai, Mallela Hari, Miyazoe Hiroyuki, Vega Reinaldo A, Venigalla Rajasekhar
surface finish, substrate, smoothing, optoelectronics, materials science
Abstract

SUBTRACTIVE PATTERNING OF BACK END OF LINE COMPATIBLE MIXED IONIC ELECTRONIC CONDUCTOR MATERIALS
Gloria Wing Yun Fraczak, Hiroyuki Miyazoe, Kumar Virwani
optoelectronics, metal, materials science, ionic bonding, electron, electrode, dielectric, conductor, blanket, back end of line
Abstract

Crossbar resistive memory array with highly conductive copper/copper alloy electrodes and silver/silver alloys electrodes
Takashi Ando, Marwan H. Khater, Seyoung Kim, Hiroyuki Miyazoe
resistive random access memory, materials science, electrode, electrical conductor, crossbar switch, copper, composite material, alloy

TAPERED METAL NITRIDE STRUCTURE
Martin M. Frank, Hiroyuki Miyazoe, Vijay Narayanan
nitride, metal, materials science, composite material

Multivalent oxide cap for analog switching resistive memory
Ando, Takashi and Khater, Marwan H and Kim, Seyoung and Miyazoe, Hiroyuki
US Patent 9,887,351
Abstract

Selective dry etch for directed self assembly of block copolymers
Engelmann, Sebastian U and Jagtiani, Ashish V and Miyazoe, Hiroyuki and Tsai, Hsinyu
US Patent 9,941,121


2017


Method of manufacturing an ultra low dielectric layer
Robert L. Bruce, Geraud J. Dubois, Gregory Fritz, Teddie P. Magbitang, Hiroyuki Miyazoe, Willi Volksen
thermal treatment, silicon, radiation, porosity, metal, materials science, dielectric, composite material
Abstract

ARTICLES INCLUDING ULTRA LOW DIELECTRIC LAYERS
Robert L. Bruce, Geraud J. Dubois, Gregory Fritz, Teddie P. Magbitang, Hiroyuki Miyazoe, Willi Volksen
porosity, metal, materials science, dielectric, composite material
Abstract

Optimal device structures for back-end-of-line compatible mixed ionic electronic conductors materials
Fraczak, Gloria Wing Yun and Miyazoe, Hiroyuki and Virwani, Kumar
US Patent 9,773,978
Abstract

Selective sputtering with light mass ions to sharpen sidewall of subtractively patterned conductive metal layer
Joseph, Eric A and Miyazoe, Hiroyuki
US Patent 9,799,519
Abstract

High aspect ratio patterning of hard mask materials by organic soft masks
Brink, Markus and Engelmann, Sebastian U and Joseph, Eric A and Miyazoe, Hiroyuki
US Patent 9,728,421

Scaled cross bar array with undercut electrode
Ando, Takashi and Khater, Marwan H and Kim, Seyoung and Miyazoe, Hiroyuki
US Patent 9,601,546
Abstract

ULTRA LOW DIELECTRIC LAYER
Bruce, Robert L and Dubois, Geraud J and Fritz, Gregory and Magbitang, Teddie P and Miyazoe, Hiroyuki and Volksen, Willi
US Patent 20,170,092,534
Abstract


2016

Hybrid subtractive etch/metal fill process for fabricating interconnects
Bruce, Robert L and Fritz, Gregory M and Joseph, Eric A and Miyazoe, Hiroyuki
US Patent App. 15/157,891
Abstract

Hybrid subtractive etch/metal fill process for fabricating interconnects
Bruce, Robert L and Fritz, Gregory M and Joseph, Eric A and Miyazoe, Hiroyuki
US Patent App. 15/157,906
Abstract

Stacked graphene field-effect transistor
Franklin, Aaron D and Miyazoe, Hiroyuki and Oida, Satoshi and Smith, Joshua T
US Patent 9,508,801
Abstract

Electrode pair fabrication using directed self assembly of diblock copolymers
Chang, Josephine B and Guillorn, Michael A and Miyazoe, Hiroyuki and Pyzyna, Adam M and Tsai, Hsinyu
US Patent 9,349,640

Self-limited crack etch to prevent device shorting
Bryce, Brian A and Chang, Josephine B and Miyazoe, Hiroyuki
US Patent 9,318,692

Dielectric tone inversion materials
Glodde, Martin and Huang, Wu-song and Miyazoe, Hiroyuki and Sooriyakumaran, Ratnam and Tsai, Hsinyu
US Patent 9,337,033

Electrode pair fabrication using directed self assembly of diblock copolymers
Chang, Josephine B and Guillorn, Michael A and Miyazoe, Hiroyuki and Pyzyna, Adam M and Tsai, Hsinyu
US Patent 9,306,164

Dielectric tone inversion materials
Glodde, Martin and Huang, Wu-Song and Miyazoe, Hiroyuki and Sooriyakumaran, Ratnam and Tsai, Hsinyu
US Patent 9,281,212


2015

Interconnects based on subtractive etching of silver
Baker-O'Neal, Brett C and Joseph, Eric A and Miyazoe, Hiroyuki
US Patent App. 14/615,077
Abstract

Magnetic Tunnel Junction Patterning Using Low Atomic Weight Ion Sputtering
Annunziata, Anthony J and Kilaru, Rohit and Marchack, Nathan P and Miyazoe, Hiroyuki
US Patent App. 14/742,382
Abstract

THIN FILM INTERCONNECTS WITH LARGE GRAINS
Bruce, Robert L and Cabral Jr, Cyril and Fritz, Gregory M and Joseph, Eric A and Lofaro, Michael F and Miyazoe, Hiroyuki and Rodbell, Kenneth P and Shahidi, Ghavam G
US Patent 20,150,348,832

Sidewall image transfer for heavy metal patterning in integrated circuits
Brink, Markus and Guillorn, Michael A and Hoinkis, Mark D and Joseph, Eric A and Miyazoe, Hiroyuki and To, Bang N
US Patent 9,171,796



2014

Niederenergie-Atzverfahren fur eine stickstoffhaltige dielektrische Schicht
Brink Markus, Bruce Robert L, Engelmann Sebastian U, Fuller Nicholas C M, Miyazoe Hiroyuki, Nakamura Masahiro
polymer chemistry, chemistry
Abstract

Strukturierung mit hoher Wiedergabetreue unter Verwendung eines Fluorkohlenwasserstoff enthaltenden Polymers
Brink Markus, Engelmann Sebastian U, Fuller Nicholas C M, Guillorn Michael A, Nakamura Masahiro, Miyazoe Hiroyuki
polymer chemistry, chemistry
Abstract

FABRICATING A SMALL-SCALE RADIATION DETECTOR
Michael S Gordon, Christopher V Jahnes, Eric A Joseph, Hiroyuki Miyazoe, Kenneth P Rodbell, Arun Sharma, Sri M Sri-jayantha
US Patent 20,140,329,351

COPPER RESIDUE CHAMBER CLEAN
Mark Hoinkis, Chun Yan, Hiroyuki Miyazoe, Eric Joseph
US Patent 20,140,345,645



2013

Low-Temperature Sidewall Image Transfer Process Using ALD Metals, Metal Oxides and Metal Nitrides
Brink, Markus and Guillorn, Michael A and Engelmann, Sebastian U and Miyazoe, Hiroyuki and Pyzyna, Adam M and Sleight, Jeffrey W
US Patent App. 13/916,109


Self-Aligned Pitch Split For Unidirectional Metal Wiring
Josephine B Chang, Michael A Guillorn, Eric A Joseph, Hiroyuki Miyazoe
US Patent App. 13/793,859



2012

Tone inversion of self-assembled self-aligned structures
Michael A Guillorn, Steven J Holmes, Chi-chun Liu, Hiroyuki Miyazoe, Hsinyu Tsai
US Patent App. 13/587,088


2011

METHOD OF SYNTHESIZING DIAMONDOIDS, AND DIAMONDOID
Kazuo TERASHIMA, STAUSS Sven Nico, Hiroyuki MIYAZOE, Takehiko SASAKI, Hirokazu KIKUCHI, Koya SAITO, Tomoki SHIZUNO, others
WO Patent 2,011,099,351