Nathan Marchack  Nathan Marchack photo         

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Resarch Staff Member - Advanced Plasma Physics and Process
Thomas J. Watson Research Center, Yorktown Heights, NY USA
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Professional Associations

Professional Associations:  American Vacuum Society  |  Electrochemical Society (ECS)  |  Materials Research Society (MRS)

more information

More information:  Prof. Jane Chang, UCLA  |  Nathan Marchack - Youtube  |  Nathan Marchack - Google Scholar


2019

Sidewall image transfer on magnetic tunnel junction stack for magnetoresistive random-access memory patterning
Hiroyuki Miyazoe, Nathan P. Marchack, HsinYu Tsai, Eugene J. O'Sullivan, Karthik Yogendra
US Patent App. 15/841,872

Method of forming field effect transistor (FET) circuits, and forming integrated circuit (IC) chips with the FET circuits
John C Arnold, Robert L Bruce, Sebastian U Engelmann, Nathan P Marchack, Hiroyuki Miyazoe, Jeffrey C Shearer, Takefumi Suzuki
US Patent 10,304,692

Image reversal process for tight pitch pillar arrays
Nathan P Marchack, Sebastian U Engelmann, Masahiro Nakamura
US Patent 10,305,029

Neuro-stem cell stimulation and growth enhancement with implantable nanodevice
Steven J Holmes, Qinghuang Lin, Emily R Kinser, Nathan P Marchack, R Yu Roy
US Patent App. 15/811,023

On-chip biosensors with nanometer scale glass-like carbon electrodes and improved adhesive coupling
Hariklia Deligianni, Bruce B Doris, Damon B Farmer, Steven J Holmes, Qinghuang Lin, Nathan P Marchack, Deborah A Neumayer, R Yu Roy
US Patent App. 15/802,802

Self-aligned and misalignment-tolerant landing pad for magnetoresistive random access memory
Anthony J Annunziata, Chandrasekharan Kothandaraman, Nathan P Marchack, Eugene J O'Sullivan
US Patent App. 15/856,681


2018

Neuro-chemical sensor with selectively permeable membrane on nano-electrode
Steven J Holmes, Emily R Kinser, Qinghuang Lin, Nathan P Marchack, R Yu Roy
US Patent App. 15/602,332

Neuro-chemical sensor with inhibition of fouling on nano-electrode
S.J. Holmes, E.R. Kinser, Q. Lin, N.P. Marchack, R.R. Yu
US Patent App. 15/602,363

Cryogenic Patterning of Magnetic Tunnel Junctions
A.J. Annunziata, C. Kothandaraman, N.P. Marchack, H. Miyazoe
US Patent 10,170,697

Combined CMP and RIE contact scheme for MRAM applications
M.F. Lofaro, N.P. Marchack, J.J. Nowak, E.J. O' Sullivan
US Patent 10,014,464

Selective growth of seed layer for magneto-resistive random access memory
A.J. Annunziata, C. Kothandaraman, N.P. Marchack, E.J. O'Sullivan
US Patent App. 15/452,357


2017

Low temperature encapsulation for magnetic tunnel junction
A.J. Annunziata, S.U. Engelmann, E.A. Joseph, G.P. Lauer, N.P. Marchack, D.A. Neumayer, M. Yamazaki
US Patent 9,691,972

Reduced process degradation of spin torque magnetoresistive random access memory
A.J. Annunziata, G.P. Lauer, N.P. Marchack, S.M. Rossnagel
US Patent 9,853,210

Enhanced coercivity in MTJ devices by contact depth control
Anthony J Annunziata, Gen P Lauer, Nathan P Marchack
US Patent 9,660,179

Spin torque mram fabrication using negative tone lithography and ion beam etching
A.J. Annunziata, A.A. Galan, S. Holmes, E.A. Joseph, G.P. Lauer, Q. Lin, N.P. Marchack
US Patent 9,705,077


2016

Techniques for forming contacts for active BEOL
Sebastian U Engelmann, Steve J Holmes, Qinghuang Lin, Nathan P Marchack, Eugene J O'sullivan
US Patent 9,490,164

Low degradation MRAM encapsulation process using silicon-rich silicon nitride film
Anthony J Annunziata, Chandrasekaran Kothandaraman, Gen P Lauer, Junghyuk Lee, Nathan P Marchack, Deborah A Neumayer, Eugene J O'sullivan, Jeong-heon Park
US Patent 9,515,252

Structure and method to reduce shorting in STT-MRAM device
Anthony J Annunziata, Gen P Lauer, Nathan P Marchack
US Patent 9,502,640


2015

Magnetic Tunnel Junction Patterning Using Low Atomic Weight Ion Sputtering
Anthony J Annunziata, Rohit Kilaru, Nathan P Marchack, Hiroyuki Miyazoe
US Patent 9,728,717