Teddie P. Magbitang  Teddie P. Magbitang photo         

contact information

Advisory Engineer/Scientist - Hybrid Polymeric Materials
Almaden Research Center, San Jose, CA, USA
  +1dash408dash927dash1464

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Professional Associations

Professional Associations:  Materials Research Society (MRS)


2017

Fundamentals of EUV resist-inorganic hardmask interactions
Dario L Goldfarb, Martin Glodde, Anuja De Silva, Indira Sheshadri, Nelson M Felix, Krystelle Lionti, Teddie Magbitang
SPIE Advanced Lithography, pp. 1014607--1014607, 2017


2016

Post porosity plasma protection integration at 48 nm pitch
Huai Huang, Krystelle Lionti, Willi Volksen, Terry Spooner, Hosadurga Shobha, Joe Lee, James Hsueh-Chung Chen, Teddie Magbitang, Brown Peethala, Eric G Liniger, and others
Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC), 2016 IEEE International, pp. 153--155

Synthesis and Thin-film Self-assembly of Cylinder-Forming High- Block Copolymers
Ankit Vora, Gabriela Alva, Anindarupa Chunder, Kristin Schmidt, Teddie Magbitang, Elizabeth Lofano, Noel Arellano, Joy Cheng, Daniel P. Sanders
Journal of Photopolymer Science and Technology 29(5), 685-688, 2016
thin film, self assembly, ring opening polymerization, polymer chemistry, organic chemistry, materials science, cylinder, copolymer

Transforming the P4 process to enhance mechanical and fracture properties of ULKs
Scott G Isaacson, Can Wang, Krystelle Lionti, Willi Volksen, Teddie P Magbitang, Reinhold H Dauskardt and Geraud Dubois
Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC), 2016 IEEE International, pp. 150--152

High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
Tsai, Hsinyu and Miyazoe, Hiroyuki and Vora, Ankit and Magbitang, Teddie and Arellano, Noel and Liu, Chi-Chun and Maher, Michael J and Durand, William J and Dawes, Simon J and Bucchignano, James J and others
SPIE Advanced Lithography, pp. 977910--977910, 2016
Abstract


2015

Synthesis and Characterization of Polycarbonate-containing All-organic High- Block Copolymers for Directed Self-assembly
Ankit Vora, Anindarupa Chunder, Melia Tjio, Teddie Magbitang, Elizabeth Lofano, Noel Arellano, Kristin Schmidt, Khanh Nguyen, Joy Cheng, Daniel P. Sanders
Journal of Photopolymer Science and Technology 28(5), 659-662, 2015
self assembly, ring opening polymerization, polymer chemistry, polycarbonate, organic chemistry, materials science, copolymer

Combined influence of pore size distribution and surface hydrophilicity on the water adsorption characteristics of micro- and mesoporous silica
Sarmenio Saliba, Patrick Ruch, Willi Volksen, Teddie P. Magbitang, Geraud Dubois, Bruno Michel
Microporous and Mesoporous Materials226, 221-228, 2015


2014

Hybrid low dielectric constant thin films for microelectronics
Willi Volksen, Krystelle Lionti, Teddie Magbitang, Geraud Dubois
Scripta Materialia74, 19-24, Elsevier, 2014


2013

Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric
R. L. Bruce, S. Engelmann, S. Purushothaman, W. Volksen, T. J. Frot, T. Magbitang, G. Dubois, M. Darnon
Journal of Physics D-Applied Physics 46(26), 2013


2012

Post porosity plasma protection applied to a wide range of ultra low-k materials
T. Frot, W. Volksen, T. Magbitang, L. Krupp, P. Rice, S. Purushothaman, M. Lofaro, S. Cohen, R.L. Bruce, G. Dubois
2012 IEEE International Interconnect Technology Conference - IITC, 3 pp.

Integration of a Manufacturing Grade, k= 2.0 Spin-On Material in a Single Damascene Structure
Willi Volksen, Sampath Purushothaman, Maxime Darnon, Mike F Lofaro, Stephan A Cohen, James P Doyle, Nicholas Fuller, Teddie P Magbitang, Philip M Rice, Leslie E Krupp, others
ECS Journal of Solid State Science and Technology 1(5), N85--N90, The Electrochemical Society, 2012

Post Porosity Plasma Protection: Scaling of Efficiency with Porosity
Theo Frot, Willi Volksen, Sampath Purushothaman, Robert L. Bruce, Teddie Magbitang, Dolores C. Miller, Vaughn R. Deline, Geraud Dubois
Advanced Functional Materials 22(14), 3043-3050, 2012


2011

Post Porosity Plasma Protection a new approach to integrate k les 2.2 porous ULK materials
T. Frot, W. Volksen, T. Magbitang, D. Miller, S. Purushothaman, M. Lofaro, R. Bruce, G. Dubois
Joint 2011 IEEE International Interconnect Technology Conference (IITC) & 2011 Materials for Advanced Metallization (MAM), 3 pp.

Future of PECVD and spin-on ultra low-k materials
W Volksen, T Frot, T Magbitang, S Gates, Mark Oliver, R Dauskardt, G Dubois
Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International, pp. 1--3

A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K≤ 2.0
W. Volksen, T.P. Magbitang, R.D. Miller, S. Purushothaman, S.A. Cohen, H. Nakagawa, Y. Nobe, T. Kokubo, G.J.M. Dubois
Journal of the Electrochemical Society158, G155, 2011

Post Porosity Plasma Protection a new approach to integrate k≤ 2.2 porous ULK materials
T. Frot, W. Volksen, T. Magbitang, D. Miller, S. Purushothaman, M. Lofaro, R. Bruce, G. Dubois
Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International, pp. 1--3


2008


Mechanical enhancement of low-k organosilicates by laser spike annealing
W. Volksen, G. Dubois, A. Kellock, T.P. Magbitang, R.D. Miller, D. Miller, S. Cohen, E.E. Simonyi, L. Ramirez, D. Markle, others
Journal of the Electrochemical Society155, G224, 2008

Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
G. Dubois, W. Volksen, T. Magbitang, M.H. Sherwood, R.D. Miller, D.M. Gage, R.H. Dauskardt
Journal of Sol-Gel Science and Technology 48(1), 187--193, Springer, 2008


2007

Molecular Network Reinforcement of Sol-Gel Glasses
Geraud Dubois, Willi Volksen, Teddie Magbitang, Robert D. Miller, David M. Gage, Reinhold H. Dauskardt
Advanced Materials 19(22), 3989-3994, 2007
sol gel, materials science, inorganic chemistry, composite material, ceramic materials

Impact of curing kinetics and materials properties on imprint characteristics of resists for UV nano-imprint lithography
Frances A Houle, Ann Fornof, Ratnam Sooriyakumaran, Hoa Truong, Dolores C Miller, Martha I Sanchez, Blake Davis, Teddie Magbitang, Robert D Allen, Mark W Hart, others
Advanced Lithography, pp. 65191C--65191C, 2007

Urea-bearing copolymers for guest-dependent tunable self-assembly
Kamps, Amanda C.; Magbitang, Teddie; Nelson, Alshakim
Chem. Commun. pp. 9, 954, Royal Society of Chemistry, 2007

Molecular network reinforcement of sol--gel glasses
G. Dubois, W. Volksen, T. Magbitang, R.D. Miller, D.M. Gage, R.H. Dauskardt
Advanced Materials 19(22), 3989--3994, Wiley Online Library, 2007


2006

Imaging Thin Films of Nanoporous Low- k Dielectrics: Comparison between Ultramicrotomy and Focused Ion Beam Preparations for Transmission Electron Microscopy
Leslie E. Thompson, Philip M. Rice, Eugene Delenia, Victor Y. Lee, Phillip J. Brock, Teddie P. Magbitang, Geraud Dubois, Willi Volksen, Robert D. Miller, Ho-Cheol Kim
Microscopy and Microanalysis 12(2), 156-159, 2006
ultramicrotomy, transmission electron microscopy, thin film, scanning transmission electron microscopy, nanoporous, materials science, focused ion beam, electron beam induced deposition, conventional transmission electron microscope, analytical chemistry

Analysis of Plasma-Induced Modification of ULK and eULK Materials: Dual Damascene Processing Challenges for 45nm (K⩽ 2.4) and Beyond BEOL Technologies
NCM Fuller, MA Worsley, S Nitta, T Dalton, TL Tai, S Bent, T Magbitang, G Dubois, R Miller, W Volksen, others
Interconnect Technology Conference, 2006 International, pp. 24--26

Imaging thin films of nanoporous low-k dielectrics: comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy
Leslie E Thompson, Philip M Rice, Eugene Delenia, Victor Y Lee, Phillip J Brock, Teddie P Magbitang, Geraud Dubois, Willi Volksen, Robert D Miller, Ho-Cheol Kim
Microscopy and Microanalysis 12(02), 156--159, Cambridge Univ Press, 2006

Laser spike annealing: a novel post-porosity treatment for significant toughening of low-k organosilicates
W. Volksen, G. Dubois, A. Kellock, T.P. Magbitang, R.D. Miller, S. Cohen, E.E. Simonyi, L. Ramirez, Y. Wang
Interconnect Technology Conference, 2006 International, pp. 146--148


2005

New spin-on oxycarbosilane low-k dielectric materials with exceptional mechanical properties
D. Geraud, T. Magbitang, W. Volksen, EE Simonyi, RD Miller
Interconnect Technology Conference, 2005. Proceedings of the IEEE 2005 International, pp. 226--228

Templating Organosilicate Vitrification Using Unimolecular Self‐Organizing Polymers: Evolution of Morphology and Nanoporosity Development with Network ...
T. Magbitang, V.Y. Lee, R.D. Miller, M.F. Toney, Z. Lin, R.M. Briber, H.C. Kim, J.L. Hedrick
Advanced Materials 17(8), 1031--1035, Wiley Online Library, 2005

Oriented Nanoporous Lamellar Organosilicates Templated from Topologically Unsymmetrical Dendritic‐Linear Block Copolymers
T. Magbitang, V.Y. Lee, J.N. Cha, H.L. Wang, W.R. Chung, R.D. Miller, G. Dubois, W. Volksen, H.C. Kim, J.L. Hedrick
Angewandte Chemie International Edition 44(46), 7574--7580, Wiley Online Library, 2005


2004

Patterned Nanoporous Poly(methylsilsesquioxane) Thin Films: A Potential High Density Substrate
Z. L. Hogan, C. R. Kreller, K. A. Tran, M. W. Hart, G. M. Wallraff, S. A. Swanson, W. Volksen, V. Y. Lee, T. P. Magbitang, J. L. Hedrick, C. J. Hawker, R. D. Miller, H. C. Kim
Mat. Science and Eng C- Biomimetic and Supramolecular Sys. 24, 487, 2004
Abstract

Templating organosilicate vitrification using unimolecular self organizing polyers
H Kim, Z Line, VY Lee, MF Toney, JL Hedrick, T Magbitang, R Briber, RD Miller
Technical Report, 2004

Nanoporous, low-dielectric constant organosilicate materials derived from inorganic polymer blends
RD Miller, W Volksen, VY Lee, E Connor, T Magbitang, R Zafran, L Sundberg, CJ Hawker, JL Hedrick, E Huang, others
ACS SYMPOSIUM SERIES, pp. 144--160, 2004

Templating Organosilicate Vitrification using Unimolecular Self Organizing Polymers: Evolution of Morphology and Nanoporosity Development with Network Formation
H.C. Kim, T. Magbitang, V.Y. Lee, R.D. Miller, M.F. Toney, Z. Lin, R. Briber, J.L. Hedrick
2004 - www-spires.slac.stanford.edu, United States. Department of Energy. Office of Science

Porous organosilicates low-dielectric films for high-frequency devices
A. Knoesen, G. Song, W. Volksen, E. Huang, T. Magbitang, L. Sundberg, J.L. Hedrick, C.J. Hawker, R.D. Miller
Journal of Electronic Materials 33(2), 135--140, Springer, 2004
Abstract

Patterned nanoporous poly (methylsilsesquioxane) thin films: a potential high density substrate
Z.L. Hogan, C.R. Kreller, K.A. Tran, M.W. Hart, G.M. Wallraff, S.A. Swanson, W. Volksen, V.Y. Lee, T.P. Magbitang, J.L. Hedrick, others
Materials Science and Engineering: C 24(4), 487--490, Elsevier, 2004

Templating Organosilicate Vitrification Using Unimolecular Self-Organizing Polymers Prepared from Tandem Ring Opening and Atom Transfer Radical Polymerizations
T. Magbitang, VY Lee, EF Connor, LK Sundberg, H.C. Kim, W. Volksen, CJ Hawker, RD Miller, J. L. Hedrick
Macromolecular Symposia, pp. 295--306, 2004

First Example of a Nanoporous High-Temperature Polymer Thermoset: Eluding Transition--Time--Temperature Constraints Associated with Organic Thermosets
E.F. Connor, V.Y. Lee, T. Magbitang, C.J. Hawker, W. Volksen, R. Siemens, R.A. DiPietro, J.C. Hedrick, H.C. Kim, R.D. Miller, J. L. Hedrick
Advanced Materials 16(17), 1525--1529, Wiley Online Library, 2004
Abstract

Pore morphologies in disordered nanoporous thin films
J.A. Hedstrom, M.F. Toney, E. Huang, H.C. Kim, W. Volksen, T. Magbitang, R.D. Miller
Langmuir 20(5), 1535--1538, ACS Publications, 2004


2003

Construction of Representative Pore Morphologies in Disordered Nanoporous Two-Phase Materials
J.A. Hedstrom, M.F. Toney, E. Huang, H.C. Kim, W. Volksen, T. Magbitang, R.D. Miller
2003 - slac.stanford.edu

Titelbild: Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers (Angew. Chem. 32/2003)
E.F. Connor, L.K. Sundberg, H.C. Kim, J.J. Cornelissen, T. Magbitang, P.M. Rice, V.Y. Lee, C.J. Hawker, W. Volksen, J.L. Hedrick, others
Angewandte Chemie 115(32), 3831--3831, Wiley Online Library, 2003

Cover Picture: Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers (Angew. Chem. Int. Ed. 32/2003)
E.F. Connor, L.K. Sundberg, H.C. Kim, J.J. Cornelissen, T. Magbitang, P.M. Rice, V.Y. Lee, C.J. Hawker, W. Volksen, J.L. Hedrick, others
Angewandte Chemie International Edition 42(32), 3703--3703, Wiley Online Library, 2003

Templating of Silsesquioxane Cross‐Linking Using Unimolecular Self‐Organizing Polymers
E.F. Connor, L.K. Sundberg, H.C. Kim, J.J. Cornelissen, T. Magbitang, P.M. Rice, V.Y. Lee, C.J. Hawker, W. Volksen, J.L. Hedrick, others
Angewandte Chemie 115(32), 3915--3918, Wiley Online Library, 2003


2002

Fabrication of Multilayered Nanoporous Poly(methyl silsesquioxane)
Ho-Cheol Kim, Jason B. Wilds, Cortney R. Kreller, Willi Volksen, Philip J. Brock, Victor Y. Lee, Teddie Magbitang, James L. Hedrick, Craig J. Hawker, Robert D. Miller
Advanced Materials 14(22), 1637-1639, 2002
silsesquioxane, polymer chemistry, organic chemistry, nanoporous, materials science

Crosslinked Nanoparticles from Stars by Intramolecular Crosslinking: A Bottom Up Approach to Polymeric Nanoparticles
RD Miller, VY Lee, E Connor, J Cornelissen, JL Hedrick, CJ Hawker, HC Kim, T Magbitang, W Volksen
Polym. Mater. Sci. Eng87, 444--445, 2002

ChemInform Abstract: Application of Complex Macromolecular Architectures for Advanced Microelectronic Materials
J.L. Hedrick, T. Magbitang, E.F. Connor, T. Glauser, W. Volksen, C.J. Hawker, V.Y. Lee, R.D. Miller
ChemInform 33(49), no--no, Wiley Online Library, 2002

Nanoporous PMSSQ Films: NR and QCM study on sorption selectivity
H.C. Kim, W. Hinsberg, W. Volksen, T. Magbitang, V. Lee, J. Hedrick, CJ Hawker, RD Miller, E. Huang, JB Wilds, others
APS Meeting Abstracts, pp. 11014, 2002

Cover Picture: Chem. Eur. J. 15/2002
J.L. Hedrick, T. Magbitang, E.F. Connor, T. Glauser, W. Volksen, C.J. Hawker, V.Y. Lee, R.D. Miller
Chemistry-A European Journal 8(15), 3287--3287, Wiley Online Library, 2002

Selective sorption of nanoporous poly (methyl silsesquioxane)
H.C. Kim, B. Jason, W.D. Hinsberg, L.R. Johnson, W. Volksen, T. Magbitang, V.Y. Lee, J.L. Hedrick, C.J. Hawker, R.D. Miller, others
Chemistry of materials 14(11), 4628--4632, ACS Publications, 2002

Application of complex macromolecular architectures for advanced microelectronic materials
J.L. Hedrick, T. Magbitang, E.F. Connor, T. Glauser, W. Volksen, C.J. Hawker, V.Y. Lee, R.D. Miller
Chemistry-A European Journal 8(15), 3308--3319, Wiley Online Library, 2002

Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle X-ray scattering
E. Huang, MF Toney, W. Volksen, D. Mecerreyes, P. Brock, H.C. Kim, CJ Hawker, JL Hedrick, VY Lee, T. Magbitang, others
Applied physics letters 81(12), 2232--2234, AIP, 2002

Fabrication of multilayered nanoporous poly (methyl silsesquioxane)
H.C. Kim, J.B. Wilds, C.R. Kreller, W. Volksen, P.J. Brock, V.Y. Lee, T. Magbitang, J.L. Hedrick, C.J. Hawker, R.D. Miller
Advanced Materials 14(22), 1637--1639, 2002


2001

Star polymers with alternating arms from miktofunctional $\mu$-initiators using consecutive atom transfer radical polymerization and ring-opening polymerization
A. Heise, M. Trollsaas, T. Magbitang, J.L. Hedrick, C.W. Frank, R.D. Miller
Macromolecules 34(9), 2798--2804, ACS Publications, 2001

A Novel Approach to Functionalized Nanoparticles: Self‐Crosslinking of Macromolecules in Ultradilute Solution
D. Mecerreyes, V. Lee, C.J. Hawker, J.L. Hedrick, A. Wursch, W. Volksen, T. Magbitang, E. Huang, R.D. Miller
Advanced Materials 13(3), 204--208, Wiley Online Library, 2001

Application of hyperbranched block copolymers as templates for the generation of nanoporous organosilicates
D. Mecerreyes, E. Huang, T. Magbitang, W. Volksen, CJ Hawker, VY Lee, RD Miller, JL Hedrick
High Performance Polymers 13(2), S11--S19, SAGE Publications, 2001


Year Unknown

Other Classes
Clark Davis Boyd, Douglas M Freimuth, William G Holland, Steven W Hunter, Renato J Recio, Steven M Thurber, Madeline Vega
CD Boyd, DM Freimuth, WG Holland, SW Hunter..., 0