Yao Qi, Raja Das, et al.
ISSTA 2009
A 157-dot-per-inch, 262K-color, 10.5-in.-diagonal, 1280 × 1024 (SXGA) display has been fabricated using a six-mask process with Cu or Al-alloy thin-film gates. The combination of high resolution and gray-scale accuracy has been shown to render color images and text with paperlike legibility. The low-resistivity gate metallization and trilayer-type TFTs with a channel length of 6-8 μm were fabricated with a six-mask process which is extendible to larger, higher-resolution displays. A combination of double-sided driving and active line repair was used so that open gate lines or data lines did not result in visible line defects. A flexible drive-electronics system was developed to address the display and characterize its performance under different drive conditions.
Yao Qi, Raja Das, et al.
ISSTA 2009
Pradip Bose
VTS 1998
Apostol Natsev, Alexander Haubold, et al.
MMSP 2007
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004