M.A. Lutz, R.M. Feenstra, et al.
Surface Science
This paper presents a general technique to determine the dynamic response of a plate excited by an orbiting mass. The technique relies on a finite element discretization in which the mesh is consistent with the trajectory of the orbiting mass, combined with a Lagrange multiplier formulation. This allows one to represent the compatibility condition at the mass-plate interface using a set of auxiliary functions. This technique can be applied to plates of any shape, excited by masses describing any type of trajectory. An example is presented to illustrate the method. © 1991.
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
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SPIE Advanced Lithography 2007
R.J. Gambino, N.R. Stemple, et al.
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