Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
IBM has a history of achieving seminal results in artificial intelligence, such as the first machine translation program, the first competitive game-playing computer, and the first speech recognition system that addressed the general dictation problem. This paper describes the unique characteristics of IBM that enabled researchers to continuously achieve breakthroughs in artificial intelligence. © 2011 IBM.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Raymond F. Boyce, Donald D. Chamberlin, et al.
CACM
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Khaled A.S. Abdel-Ghaffar
IEEE Trans. Inf. Theory