Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Motivated by service systems with time-varying customer arrivals, we consider a fluid model as a macroscopic approximation for many-server Markovian queues alternating between underloaded and overloaded intervals. Our main result is a refinement of the piecewise stationary approximation (PSA) for the stationary distribution of the fluid model. The form of the refined approximation suggests simple metrics for assessing the accuracy of PSA for underloaded and overloaded intervals respectively. © 2012 Elsevier B.V. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Chai Wah Wu
Linear Algebra and Its Applications
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena