American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Paper

01 Mar 1996

Future packaging materials: Cost performance, and environmental issues

Conference paper

Synthesis and lithographic performance of poly-4-hydroxyphenyl ethyl methacrylate based negative resists

J. Gelorme, L.L. Kosbar, et al.

Microlithography 2000

Conference paper

Electrophoretic deposition of polyimide: Electrocoating on the cathode

Stephen L. Buchwalter

ACS PMSE 1988

Paper

Polysiloxanes for deep UV lithography

J.M. Shaw, M. Hatzakis, et al.

Microelectronic Engineering

Conference paper

High-speed aqueous-developing negative resist based on triflic-acid-catalyzed epoxy polymerization

R.D. Allen, Willard E. Conley, et al.

Microlithography 1992

View all publications