Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper is devoted to the analysis of a finite horizon discrete-time stochastic optimal control problem, in presence of constraints. We study the regularity of the value function which comes from the dynamic programming algorithm. In particular, we derive estimates of the Lipschitz constant of the value function, by means of a regularity result of the multifunction that defines the admissible control set. Copyright © 2006 Watam Press.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Robert Manson Sawko, Malgorzata Zimon
SIAM/ASA JUQ
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
A. Skumanich
SPIE OE/LASE 1992