J.C. Beckman, T.H.P. Chang, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Miniature Electron-Optical Columns
Abstract
Miniaturized electron-optical systems based on a field emission microsource and a microlens for probe forming have been studied. The performance of systems with dimensions (length and diameter) in the submillimeter to millimeters range can exceed that of a conventional system over a wide range of potentials (100 V to 10 kV) and working distances (up to 10 mm). © 1991 IEEE