Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The first momentum-resolved bremsstrahlung (or inverse photoemission) experiments using a tunable light detector in the energy range from 10 to 40 eV are reported. The experimental setup comprises a Pierce-type electron gun, a Seya monochromator, and a position-sensitive channel plate detector. An energy resolution of 0.3 eV at 20 eV has been achieved and the momentum resolution is 0.1 Å-1 The apparatus has been used to determine the energy band dispersion of unoccupied minority spin 3d states in Co. A ferromagnetic exchange splitting of 0.93 ±0.1 eV between the unoccupied spin-down and occupied spin-up states (measured with photoemission) is derived. Another application is the measurement of unoccupied adsorbate levels of CO on Ni( 111). Detecting the polarization of the photons (using the polarization-dependent reflectivity of the monochromator) enables us to identify the symmetry character of the adsorbate orbitals. For a Si( 111)—(7 × 7) surface, empty surface states are found in the band gap. © 1983, American Vacuum Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
E. Burstein
Ferroelectrics
R. Ghez, J.S. Lew
Journal of Crystal Growth