Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Systems of difference equations containing small parameters are studied by a constructive perturbation scheme analogous to the one developed by the authors for the study of differential equations. The method results in an averaging procedure for difference equations, and it is particularly well suited to certain highly oscillatory, nonlinear systems. The method is applied to problems from population genetics, pattern recognition, and the numerical analysis of stiff differential equations.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
Igor Devetak, Andreas Winter
ISIT 2003