Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
LaTiO3.5 is a layered compound made up of four LaTiO3 units: two regular perovskite units stacked between two distorted units that share an additional oxygen layer. In a single-crystalline thin film the (100) plane can be aligned parallel to the substrate surface, i.e., the additional oxygen layers are inserted parallel to the substrate surface. A detailed structural characterization reveals planar defects originating from substrate surface steps. These results, in combination with the in situ reflection high-energy electron-diffraction observations, suggest an oxidation mechanism using such antiphase boundaries as oxidation paths. © 2001 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
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ACS Macro Letters