A. Gangulee, F.M. D'Heurle
Thin Solid Films
The feasibility of nano-scale strained-Si technologies for low-power applications is studied. Static and dynamic power for strained-Si device is analyzed and compared with conventional bulk-Si technology. Optimum device design points are suggested, and strained-Si CMOS circuits are studied, showing substantially reduced power consumptions. The trade-offs for power and performance in strained-Si devices/circuits are discussed. Further, analysis and low-power design points are applied and extended to strained Si on SOI substrate (SSOI) CMOS technology. © 2004 Elsevier Ltd. All rights reserved.
A. Gangulee, F.M. D'Heurle
Thin Solid Films
A. Reisman, M. Berkenblit, et al.
JES
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering