Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
We study the composition of random permutations drawn from a small family of O(n3) simple permutations on (0, 1)n. Specifically, we ask how many randomly selected simple permutations need be composed to yield a permutation that is close to k-wise independent. We improve on the results of Cowers (Combin Probab Comput 5 (1996) 119-130) and Hoory et al. (Presented at 31st ICALP 2004) and show that it suffices to compose min(O(n3k 2), Õ(n2k2)) random permutations from this family for any n ≥ 3 and k ≤ 2n - 2. The Õ notation suppresses a poly logarithmic factor in k and n. © 2007 Wiley Periodicals, Inc.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Sonia Cafieri, Jon Lee, et al.
Journal of Global Optimization
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011