PaperOxide scaling limit for future logic and memory technologyJ.H. Stathis, D.J. DiMariaMicroelectronic Engineering
PaperElectroluminescence studies in silicon dioxide films containing tiny silicon islandsD.J. DiMaria, J.R. Kirtley, et al.Journal of Applied Physics
PaperElectrically-alterable read-only-memory using Si-rich SiO2 injectors and a floating polycrystalline silicon storage layerD.J. DiMaria, K.M. DeMeyer, et al.Journal of Applied Physics