Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A unimolecular templating star-shaped polymer with a compatibilizing outer corona, prepared by tandem ROP/ATRP procedures, was dispersed into a thermosetting organosilicate. The organic polymer was thermalized to leave behind its latent image in the matrix with a pore size that reflected the size of the polymer molecule, and provided the expected reduction in dielectric constant.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films