M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Some results on the lateral diffusion of indium in thin lead films containing 2.5 wt.% Au are described. At room temperature the diffusion rate is high with a diffusion coefficient D of about 2.5 x 10-12 cm2 s-1 and an activation energy of 0.26±0.1 eV. The indium concentration profile along the films is highly irregular and is characterized by a sharp peak within the diffused film area at the diffusion front. Some of the irregularities are explained by the formation of filaments of near-stoichiometric AuIn2 and by diffusion around grains of varying size. The preferential formation of AuIn2 is likely to be the cause of the lower diffusion rate observed in the Pb-Au films in comparison with pure lead films. It is found that hillocks are nucleated in the vicinity of the indium diffusion front, indicative of strain relaxation. © 1977.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997