PaperHierarchical hydrodynamic flow confinement: Efficient use and retrieval of chemicals for microscale chemistry on surfacesJulien Autebert, Aditya Kashyap, et al.Langmuir
Conference paperX-ray lithography induced radiation effects in deep submicron CMOS devicesL.K. Wang, A. Acovic, et al.MRS Spring Meeting 1993