Barrier Layers: Principles and applications in microelectronics
- Marc Wittmer
- 1984
- JVSTA
Publications
176 results at JVSTA
Metal clusters in plasma polymerized fluorocarbon films: Cobalt-aluminum
- Eric Kay
- M. Hecq
- et al.
- 1984
- JVSTA
Summary Abstract: How many metal atoms are involved in dissociative chemisorption?
- C.R. Brundle
- J. Behm
- et al.
- 1984
- JVSTA
The Adsorption of PH3 on Si(100) and its Effect on the Coadsorption of SiH4
- Ming L. Yu
- B.S. Meyerson
- 1984
- JVSTA
Chemical reaction and silicide formation at the Pt/Si interface
- R. Mate
- R.J. Purtell
- et al.
- 1984
- JVSTA
Vibrational spectroscopy of chemisorbed molecules by infrared emission
- S. Chiang
- R.G. Tobin
- et al.
- 1984
- JVSTA
Homogeneous chemical vapor deposition
- B.A. Scott
- W.L. Olbricht
- et al.
- 1984
- JVSTA
Theoretical study of the adsorption of oxygen on Si(100)
- Inder P. Batra
- P.S. Bagus
- et al.
- 1984
- JVSTA
A simple bearing for horizontal rotation of heavy equipment in UHV
- W. Stocker
- K.H. Rieder
- 1984
- JVSTA
Momentum-resolved bremsstrahlung spectroscopy with a tunable photon detector
- Th. Fauster
- F.J. Himpsel
- 1983
- JVSTA