Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

A study of voids in sputtered Si02
- - Mitchell J. Hait
  - Harris C. Jones
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission characterization of a divergent magnetic field electron cyclotron resonance source
- - John S. McKillop
  - John C. Forster
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A He and Ne diffraction study of the W(100) phase transition
- - E. Schweizer
  - C.T. Rettner
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The angular dependence of preferential sputtering and composition in aluminum-copper thin films
- - P. Rudeck
  - J.M.E. Harper
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The chemical interaction of Mn with the MoS2(0001) surface studied by high-resolution photoelectron spectroscopy
- - Jeffrey R. Lince
  - Thomas B. Stewart
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Competitive reactions of fluorine and oxygen with W, WSi2, and Si surfaces in reactive ion etching using CF4/O2
- - Gottlieb S. Oehrlein
  - J. Lennart Lindsöm
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nucleation of new solid phases from chemical interactions at an interface
- - F.M. Heurle
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface analysis of realistic semiconductor microstructures
- - Gottlieb S. Oehrlein
  - Kevin K. Chan
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
interface states and Schottky barrier formation at metal/GaAs junctions
- - R.E. Viturrc
  - C. Mailhiot
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A comparison between aluminum and copper interactions with high-temperature oxide and nitride diffusion barriers
- - A. Charai
  - S.E. Harnstram
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films