Control of microstructure and properties of copper films using ion-assisted deposition
- R.A. Roy
- J.J. Cuomo
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Diffusion of boron, phosphorus, and arsenic implanted in thin films of cobalt disilicide
- O. Thomas
- P. Gas
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Valence-band photoemission and electron energy-loss studies of reactive ion etched silicon dioxide
- S.W. Robey
- G.S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Atomic force microscopy using optical interferometry
- R. Erlandsson
- G.M. Mcclelland
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Magnetron plasma diagnostics and processing implications
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Angular distribution of particles sputtered from metals and alloys
- A. Wucher
- W. Reuter
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Image processing techniques for obtaining registration information with scanning tunneling microscopy
- R.J. Wilson
- S. Chiang
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Magnetoreflectivity study of excitons in molecular-beam epitaxially grown Zn, _ xFe<inf>x</inf>Se crystals
- X. Liu
- A. Petrou
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Theory of scanning tunneling spectroscopy
- C. Julian Chen
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Metal-polymer chemistry. II. Chromium-polyimide interface reactions and related organometallic chemistry
- M.J. Goldberg
- J.G. Clabes
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films