Summary Abstract: Electron vibrational spectroscopy of polymer-vacuum and polvmer-metal interfacesJ.E. DemuthT.C. Clark1986JVSTA
Effects of biased cosputtering on resistivity and step coverage in tungsten silicide filmsK.W. ChoiK.Y. Ahn1985JVSTA
Summary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar systemK. KehlerJ.W. Coburnet al.1985JVSTA