Kinetic model for the chemical vapor deposition of tungsten in the silane reduction process
- Julian J. Hsieh
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of substrate bias frequency in an electron cyclotron resonance plasma reactor
- W.M. Holber
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Directionality of Sputtered Cu Atoms in A Hollow Cathode Enhanced Planar Magnetron
- S.M. Rossnagel
- J.J. Cuomo
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Influence of energy reflected from the target on thin film characteristics
- Harold F. Winters
- H. Coufal
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Selective reactive ion etching of phosphorus-doped oxide over undoped SiO2
- David Vender
- Gottlieb S. Oehrlein
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive Ion Etching of Sige Alloys using Fluorine-Containing Plasmas *
- James W. Corbett
- Gottlieb S. Oehrlein
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electromagnetic fields in a radio-frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Langmuir probe measurements of a radio frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Chemistry and morphology of Cr/BPDA-PDA interface formation
- Steven G. Anderson
- Jihperng Leu
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Temperature-Dependent Composition, Ordering, and Band Bending at Gap(100) Surfaces
- C.L. Lin
- L.J. Brillson
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films