Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Phonon spectra are calculated for fcc Ar36 at 4, 40, and 77 °K using the pair potential for argon atoms derived by Bobetic and Barker. The calculation employs a quasiharmonic basis with three-body forces and a perturbation-theory treatment of the anharmonicity. Poor agreement is obtained with the experimental temperature shifts of transverse phonons propagating along the [ξ00] direction. Self-consistent phonons are also calculated at 0 °K for both the Bobetic-Barker and Dymond-Alder potentials. On the basis of existing phonon data, the latter appears to be ruled out as a realistic pair potential. © 1971 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michiel Sprik
Journal of Physics Condensed Matter
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano